Pt and Pd Nanoparticle Crystallization in the Sol-Gel-Derived Thin SiO2 Films

The crystallization and distribution the features of Pt, Pd Pt/Pd nanoparticles in spin-on glass SiO2 films were studied within a wide range dopant concentrations silica sol (from 10 to 80 mol.% or per 100 Si). grazing incidence X-ray diffraction (GIXRD) characterization revealed that formation 4–8 nm sized crystalline began at least Pt and/or Si. obtained from sols with lower characterized by an amorphous structure. dopants over film thickness (~21–47 nm) was using reflectometry. effect concentration, spin-coating modes heat treatment temperature on characterized. When only one (Pt Pd) introduced into sol, resulting preferentially localized close surface. used together, distributed more evenly.